Optimized Measurement Methods Evaluating Crosstalk in different SOI Technologies

Crosstalk can reduce the performance of RF, analog, mixed-signal and digital integrated circuits. Measurement methods using appropriate measurement parameters to evaluate substrate crosstalk are discussed. Several layout options and technological parameters are compared. Based on these results the designer can choose and combine a set of options for more isolation of sub circuits to fulfill the requirements for the specific application. The focus is set on the different Silicon on Insulator technologies. Depending on frequency range the influence of isolation measures and their combinations is shown. The S-parameters of several test structures were measured using a vector network analyzer. The main results are differences in crosstalk between 50 MHz and 300 MHz.