Determine the influence factor of geometrical parameters on the dynamic characteristics of the micro crab-shaped beam

Microelectromechanical devices are being used much more in science and technology to reduce energy consumption and increase accuracy. The design of mechanical structures in these devices requires reducing the cost of testing and prototype manufacturing. It is necessary to define the essential parameters in designing the microstructures to reduce the design time. This paper presents a simulation method to determine the influence of the geometrical parameters of the micro-beam models with Crab-shaped used in the micro-mechanical structures on the equivalent stiffness. The significant parameters influencing the rapid change of equivalent stiffness are shown using the local sensitivity analysis technique and the surface response in the ANSYS Workbench. The results show that the length of the sensing bar with the convex curve and the maximum deviation is 76% for the equivalent stiffness, while the width of the beam with the concave curve gives the maximum value of 400% at the same 70% of the variation of each geometrical parameter. The local sensitivity analysis values for the length of the driving and sensing bar, and the width of the crab-shaped beam are -1.4485, -0.2786, and +2.0355, respectively. These analysis results are essential for choosing the suitable value for the geometrical parameters of the micromechanical structure according to the proposed resonant frequency in further studies