ModelGen: Automating Semiconductor Parameter Extraction with Large Language Model Agents

Device models require large numbers of parameters to characterize complex physical effects. Although the latest advancements in machine learning and automated tools have drastically improved efficiency over the classic methods, they still demand a considerable amount of human intervention in the loop to gain accuracy. This drastically limits further automation. Inspired by the success of Multimodal Large Language Models (MLLMs) in addressing tasks across diverse fields, we propose ModelGen, the first in-depth study to leverage MLLMs with RAG (Retrieval-Augmented Generation) to significantly reduce human effort in parameter extraction for compact model. Our contributions include (1) Automated Agentic Workflow Construction that learns to build and refine extraction workflows through iterative optimization, (2) MLLM Judge, a visual scoring mechanism that evaluates fitting quality using actual device characteristic plots rather than simple numerical metrics, and (3) Model-specific RAG for providing relevant domain knowledge during the extraction process. Experimental results demonstrate that ModelGen achieves a 26.8%–33.1% improvement in pass@1,3,5 compared to base LLM methods. The system completes complex model extractions for BSIMs and ASM-HEMT in hours (up to 168× faster) rather than days or weeks, making parameter extraction more accessible to non-experts while maintaining professional engineer-level accuracy.