Finite Element Analysis of a Modular Piezoelectric Micropump Design

The growing interest in microelectromechanical systems (MEMS) technologies is driving research in this area.One of the important elements used in MEMS technologies are micropumps.Most often, micropumps have an integrated membrane made of different materials that is directly affected by the excitation source.In this work, the membrane is integrated into the housing (made of the same material) and is separated from the excitation source.This reduces the complexity of production and the number of parts to be assembled.Finite element analysis has shown that this type of micropump works and can achieve a performance of 1.25 l/s.In addition, it is planned to improve the geometry, mathematical model, and manufacturing technology of the micropump to increase the micropump performance.