Novel ultraflexible transparent self-heating composite films for nanoimprint lithography

• The self-heating composite films with high heating efficiency of nanoimprint lithography were synthesized. • Ultra-rapid heating and cooling enhance the performance and efficiency of nanoimprint lithography. • Enable precise temperature control by adjusting voltages to enhance the accuracy of pattern transfer. The novel self-heating composite films aim to provide an innovative heat source solution for nanoimprint lithography technology (NIL). The composite films are deposited by spin coating silver nanowires (AgNWs) on patterned substrates and then coating the AgNWs surface with polyvinyl alcohol (PVA) dissolved in water. After curing, they are peeled off from the patterned substrates to form composite films with self-heating function (AgNWs/PVA). The films can generate heat when a voltage is applied by introducing positive and negative electrodes, simplifying the design of the heating module in nanoimprint lithography equipment and achieving rapid and accurate heat transfer to the target substrates. Experiments have shown that the films can be heated to 60 ℃ within 30 s after applying a voltage of 10 V, and can quickly cool to room temperature within 20 s after disconnecting the power supply. The ultraviolet transmittance of the films reaches 84.82 % at 248 nm while maintaining a sheet resistance of 10 Ω/sq. In addition, the films also have strong mechanical stability and oxidation resistance. This work provides a novel strategy for preparing high-performance and stability self-heating composite films which would be efficiently applied to nanoimprint lithography technology.