Effect of post-metallization anneal on monolithic co-integration of Hf0.5Zr0.5O2-based FeFET and CMOS

Hafnium oxide-based ferroelectrics, particularly zirconium-doped HfO₂ (HZO), have demonstrated excellent compatibility with CMOS fabrication processes. However, the impact of post-metallization annealing (PMA)-a key step in optimizing device performance-on CMOS and FeFET co-integrated devices has yet to be fully explored. This study investigates the effects of PMA under N₂ and H₂ ambients on the electrical properties of pMOSFET and nFeFET devices monolithically co-integrated on an 8-inch wafer. N₂ annealing leads to a significantly larger memory window in FeFETs, attributed to enhanced crystallinity and reduced oxide-trapped charges. In contrast, while H₂ annealing is less effective in improving ferroelectric properties, it markedly lowers the interface trap density (D_it) in both CMOS and FeFET devices. This reduction in D_it leads to improved SS, as reflected in the higher gain observed in FeFET-based co-integrated inverters. These findings offer valuable insights for optimizing PMA conditions based on the performance requirements for co-integrated FeFET and CMOS devices.