Discharge characteristics of a hybrid plasma source using hot cathode arc discharge and helicon wave discharge

Abstract High-density and large-diameter plasma generation is expected to contribute to semiconductor manufacturing, space propulsion, and nuclear fusion. We develop a plasma generation method for high-density, large-diameter plasma by combining the advantages of both hot cathode arc discharge and helicon wave discharge characteristics. The experiment confirmed that hybrid discharges produce a higher-density plasma compared to standalone arc discharges or helicon wave discharges across a wide range of gas pressures. Additionally, the diameter of the plasma was found to be twice as large as that of arc discharges alone. The mechanisms behind hybrid discharge and potential performance improvements are discussed.