Laser-Induced Periodic Nanostructure on Polyimide Film Surface Using 248 nm Excimer Laser

In this study, nanoscale periodic surface structures were fabricated on polyimide (PI) films using a linearly polarized KrF excimer laser with a wavelength of 248 nm. The effects of laser energy density and pulse number on the morphology and surface roughness of laser-induced periodic surface structures (LIPSSs) were systematically investigated. When the pulse width was 20 ns, the repetition rate was 10 Hz, and the beam incidence angle was normal (90°), periodic ripples with a spatial period of approximately 200 nm formed within an energy density range of 7-18 mJ/cm² and pulse number range of 6000-18,000. The most uniform and well-defined structures were achieved at 14.01 mJ/cm² and 12,000 pulses, with a ripple depth of 60 nm and surface roughness (Ra) approximately 26 times greater than that of pristine PI. The ripple orientation was consistently perpendicular to the laser polarization, consistent with low-spatial-frequency LIPSS (LSFL) formation mechanisms governed by interference-induced photothermal effects. In addition, surface wettability was found to be significantly enhanced due to changes in both surface chemistry and topography, with the water contact angle decreasing from 73.7° to 19.7°. These results demonstrate the potential of UV nanosecond laser processing for the scalable fabrication of functional nanostructures on polymer surfaces for applications in surface engineering and biointerfaces.