The influence of Li-doping on the structural and optical characteristics of ZnO thin films

The objective is to investigate the structure and optical characteristics of Zn1-_xLi_xO thin films. The Zn1-_xLi_xO thin films with varying doping ratios were deposited on Si substrates using the Magnetron Sputtering Method. Concurrently, X-ray diffraction (XRD), atomic force microscopy (AFM), and photoluminescence (PL) were utilized to characterize their structure, morphology, and luminescence. The results demonstrated that the films exhibited distinct (002) peaks at a temperature of 450℃; It was observed that Li-doping did not significantly alter the surface of the ZnO thin film; it could diminish the bandgap of ZnO thin films and induce a redshift in the inter-band transition peak with an increasing proportion of Li-doping; it exerted a substantial effect on the peak intensity as the quantity varied.