New Loss Function for Learning Dielectric Thickness Distributions and Generative Modeling of Breakdown Lifetime

This work introduces a new loss function for modeling dielectric lifetime distributions with thickness nonuniformity. It is applicable to both maximum likelihood estimation and to a previously introduced machine learning (ML) framework, providing better agreement between measurement data and generated distributions. The ML method is used to model die and wafer level lifetime distributions and thickness variation. An analytic expression relating dielectric thickness to leakage current or vice versa can be extracted.