Research on Automatic Regulation of Focused Ion Beam Parameters Based on Image Scoring
AI's advancement prioritizes industrial automation for resource efficiency and control accuracy. SEMs, evolving with semiconductor tech, now shift from manual to auto-control. Our paper introduces an auto-algorithm for SEM focus and fine-tuning, featuring image quality scoring and parameter adjustment. Using Python, we analyze image edges, gray values, contrast, and noise, refining parameters for clarity. Our method adaptively adjusts parameter steps based on image scores, accelerating convergence to optimal values, thus enhancing automation and efficiency in industrial applications.
Authors
- Zhan Shi (ORCID: https://orcid.org/0000-0001-9717-1487)
- Yongchun Xiao (ORCID: https://orcid.org/0000-0001-7233-5780)
- Wei Sun (ORCID: https://orcid.org/0000-0002-1284-4062)
- Meixia Li (ORCID: https://orcid.org/0000-0003-0737-1915)
- Minglai Yang
- Ying Wang (ORCID: https://orcid.org/0009-0008-3662-2692)
Institutions
- Shanghai Jiao Tong University (CN)
- Jilin Agricultural University (CN)
- Shanghai Institute of Technology (CN)
Publication Details
- Published
- 2025-02-28
- DOI
- https://doi.org/10.1109/iccece65250.2025.10985696
- Primary Topic
- Ion-surface interactions and analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00