Electromigration Performance of Cu Bumps in Various Configurations

To investigate the effect of bump structure on electromigration (EM) performance, four bump structures were designed: Cu/solder/OSP, Cu/Ni/solder/OSP, Cu/solder/ENEPIG, and Cu/Ni/solder/ENEPIG. The EM test results show that the EM performance of Cu bumps is significantly affected by the bump scheme and the direction of electron flow. The early failure rate is higher when the electron flow originates from the Ni-rich barrier side. Furthermore, the Cu/Ni/solder/ENEPIG system shows the highest early failure rate due to its single Sn grain structure. This study challenges the previous belief regarding the Ni barrier, suggesting that the inclusion of a Ni-rich barrier may necessarily have a detrimental impact on the EM performance of Cu bumps.

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Publication Details

Published
2025-03-30
DOI
https://doi.org/10.1109/irps48204.2025.10982917
Primary Topic
Copper Interconnects and Reliability
Type
article
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article

Electromigration Performance of Cu Bumps in Various Configurations

Ryan Lu, Yao-Chun Chuang, Chen‐Nan Chiu, C. Y. Liu et al.
Copper Interconnects and Reliability
article

Electromigration Performance of Cu Bumps in Various Configurations

Ryan Lu, Yao-Chun Chuang, Chen‐Nan Chiu, C. Y. Liu, Jui‐shen Chang, Chung-Yu Chiu
article en

Abstract

To investigate the effect of bump structure on electromigration (EM) performance, four bump structures were designed: Cu/solder/OSP, Cu/Ni/solder/OSP, Cu/solder/ENEPIG, and Cu/Ni/solder/ENEPIG. The EM test results show that the EM performance of Cu bumps is significantly affected by the bump scheme and the direction of electron flow. The early failure rate is higher when the electron flow originates from the Ni-rich barrier side. Furthermore, the Cu/Ni/solder/ENEPIG system shows the highest early failure rate due to its single Sn grain structure. This study challenges the previous belief regarding the Ni barrier, suggesting that the inclusion of a Ni-rich barrier may necessarily have a detrimental impact on the EM performance of Cu bumps.

Taiwan Semiconductor Manufacturing Company (Taiwan) (TW)
Openalex Percentile: Top 94%
Copper Interconnects and Reliability
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