Multiscale Modeling and Calibration of Hot-Carrier Stress Degradation in SiGe DRAM Peripheral MOSFETs

A new multiscale simulation flow for hot-carrier stress (HCS) degradation that combines ab-initio, Spherical Harmonic Expansion of Boltzmann transport equation and TCAD simulations is developed and applied to DRAM peripheral MOSFETs. Automatic calibration strategies for the TCAD model are also implemented. The simulations are validated against experimental data from Si/SiGe n- and p-MOSFETs, thus giving insights into the physical mechanisms responsible for HCS degradation and showing its efficiency to rapidly design reliable DRAM peripheral transistors.

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Publication Details

Published
2025-03-30
DOI
https://doi.org/10.1109/irps48204.2025.10983620
Primary Topic
Advancements in Semiconductor Devices and Circuit Design
Type
article
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article

Multiscale Modeling and Calibration of Hot-Carrier Stress Degradation in SiGe DRAM Peripheral MOSFETs

Nikolas Zographos, Youngseok Lee, Luca Silvestri, Xi–Wei Lin et al.
Advancements in Semiconductor Devices and Circuit Design
article

Multiscale Modeling and Calibration of Hot-Carrier Stress Degradation in SiGe DRAM Peripheral MOSFETs

Nikolas Zographos, Youngseok Lee, Luca Silvestri, Xi–Wei Lin, Seung‐Woo Son, Ho‐Jang Kwon, W.H. Yim, Soo‐Min Jin, Hyunjin Shim, Wonwoo Jeong, Nayoung Kim, Do Hoon Oh, L. Sponton
article en

Abstract

A new multiscale simulation flow for hot-carrier stress (HCS) degradation that combines ab-initio, Spherical Harmonic Expansion of Boltzmann transport equation and TCAD simulations is developed and applied to DRAM peripheral MOSFETs. Automatic calibration strategies for the TCAD model are also implemented. The simulations are validated against experimental data from Si/SiGe n- and p-MOSFETs, thus giving insights into the physical mechanisms responsible for HCS degradation and showing its efficiency to rapidly design reliable DRAM peripheral transistors.

Synopsys (Switzerland) (CH), SK Group (South Korea) (KR), Synopsys (United States) (US)
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Advancements in Semiconductor Devices and Circuit Design
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