An Anodic Target Strategy for Microfocused X-Ray Device: Enhancing and Tuning Effects of Molybdenum Nanostructures on Radiation Properties

Microfocused X-rays with high brightness and high spatial resolution performance are increasingly important for advanced analytical and imaging applications. Developing high-performance, miniaturized, and tunable microfocused X-ray source devices requires innovative approaches to optimize radiation properties. This study establishes an anodic target strategy based on molybdenum nanostructures to investigate their effects on X-ray radiation properties through Monte Carlo simulations: The molybdenum nano-cylinder with 1 μm diameter and 0.9 μm height under 40 keV electron beam excitation provides optimal balance between radiation efficiency and brightness, while a maximum output flux can be achieved with thicker targets approaching the electron transmission range limit. The effective focal spot size decreases when transforming the cylinder structure into a cone, achieving better balance between focal spot and radiation flux at conification degrees αc < 0.6. Nanostructures orienting with their base facing the incident electron beam maximizes radiation flux and brightness by reducing electron backscattering. Thermal management considerations further reveal that rotating anode designs with pulsed excitation could significantly increase sustainable electron current density. These insights provide theoretical guidance for optimizing microfocused X-ray source devices using tailored nanostructured anodes for applications requiring high spatial resolution such as micro X-ray fluorescence analysis.