NO<sub>2</sub> detection via microwave-based gas sensor with SnO<sub>2</sub> deposited by ALD
In this paper, the gas-sensing characteristics of the tin dioxide (SnO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>) gas-sensitive layer, deposited by atomic layer deposition (ALD), in the microwave frequency range are presented and discussed. The microwave-based gas sensor was previously designed in the form of a meander-type transmission line working at 5.8 GHz with an eight-port reflectometer part and tested with several MOX films. At the same time, ALD has not been reported yet in microwave-based gas-sensing applications. The sensor was tested in the 0-10 ppm range of nitrogen dioxide at various relative humidity (RH) and operating temperatures (OT). The measured limit of detection (LOD) was as low as 0.05 ppm while the estimated LOD could reach 0.005 ppm. The obtained results can be used to further optimize the microwave-based sensing elements for various applications including gas sensors where high relative humidity levels are expected to exist.
Authors
- К. Marszałek (ORCID: https://orcid.org/0000-0002-0564-5743)
- Artur Rydosz (ORCID: https://orcid.org/0000-0002-9148-1094)
- Ryan W. Crisp (ORCID: https://orcid.org/0000-0002-3703-9617)
- Dominik Grochala (ORCID: https://orcid.org/0000-0001-9970-710X)
- Kamil Staszek (ORCID: https://orcid.org/0000-0002-3866-8466)
- Anna Paleczek (ORCID: https://orcid.org/0000-0002-1467-3017)
- Łukasz Błajszczak
- Stanislaw Karcz
- Mateusz Kocoń
- Selina Kern (ORCID: https://orcid.org/0009-0004-6378-1710)
Institutions
- Jagiellonian University (PL)
- AGH University of Krakow (PL)
Publication Details
- Published
- 2025-03-17
- DOI
- https://doi.org/10.23919/gemic64734.2025.10979063
- Primary Topic
- Gas Sensing Nanomaterials and Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.00