Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring Machine

In the field of advanced manufacturing, with the rapid development of micromachining and microelectromechanical systems, the demand for 3D high-precision measurement is increasingly urgent. To address the contradiction between large-stroke motion and high-precision measurement, a new cross-scale micro-nano coordinate measuring machine (CSMN-CMM) is developed in this paper. The measuring machine’s measurement method is with the probe fixed and the worktable(workpiece) moving. The metrology system consists of three-axis laser interferometers and an angle measurement system, which can measure the worktable’s spatial coordinates and posture in real-time. The entire metrology system adheres to the Abbe principle and is also independent of the motion system, which avoids the influence of the motion system. The motion system comprises a 3D large-stroke macro-motion stage and a six-degree-of-freedom (6-DOF) micro-motion stage, which can achieve high-precision and rapid driving of the worktable within a motion range of 100 mm × 100 mm × 100 mm. The developed 6-DOF micro-motion stage is driven through piezoelectric ceramics. It can achieve more than 20 μm linear displacement for each axis with a resolution better than 0.56 nm and over 27″ angular displacement with a resolution better than 0.09″. It ensures precise driving and spatial posture adjustment of the worktable. In terms of the control of the CSMN-CMM, the paper proposes macro-micro collaborative positioning and secondary triggering strategies to enhance measurement performances. These strategies achieve positioning accuracy better than 6.4 nm and the repeatability of the probe better than 20 nm (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">k</i>=1) in the 3D direction. The maximum permissible error of the CSMN-CMM is evaluated following ISO 10360-2, which is better than ±(250 + 3.6 × 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-6</sup>L) nm. A series of experimental results shows that the developed CSMN-CMM has outstanding measurement performance in 3D space. Furthermore, its innovative structural design and key technologies are important for enhancing the current micro-nano measurement technology.