Hybrid piezoelectricity enabled flexible AZO/SiC thin films sensor with a high output voltage and broad temperature range
A high-temperature resistant flexible AZO/SiC pressure sensor is proposed. The sensor presenting high sensitivity, fast response and high reliability, the incorporation of SiC enhances charge transfer capability and conductivity of AZO.
Authors
- Xing Jia (ORCID: https://orcid.org/0009-0003-8012-4483)
- Ningbo Liao (ORCID: https://orcid.org/0009-0008-1034-2887)
- Wei Xue (ORCID: https://orcid.org/0000-0002-2576-6067)
- Zhaohui Weng
- Qiaobang Xiang
Institutions
- Wenzhou University (CN)
- Zhejiang Lab (CN)
Publication Details
- Journal
- Journal of Materials Chemistry C
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1039/d5tc00445d
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00