Silane production from the dichlorosilane by-product of the Siemens process: a comparative study with the trichlorosilane route

The DCS-based silane production process exhibits higher reaction efficiency and lower energy consumption compared to the conventional TCS route, while enabling seamless integration with the Siemens process for polysilicon production.

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Publication Details

Journal
Industrial Chemistry and Materials
Published
2025-01-01
DOI
https://doi.org/10.1039/d5im00040h
Citations
2
Primary Topic
Advancements in Battery Materials
Type
article
Field-Weighted Citation Impact
1.46

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article

Silane production from the dichlorosilane by-product of the Siemens process: a comparative study with the trichlorosilane route

Wen‐De Xiao, Zi-Yi Chi, Xue‐Gang Li, Mingdong Zhou et al.
2 citations
Industrial Chemistry and Materials
Advancements in Battery Materials
1.46
article

Silane production from the dichlorosilane by-product of the Siemens process: a comparative study with the trichlorosilane route

Wen‐De Xiao, Zi-Yi Chi, Xue‐Gang Li, Mingdong Zhou, P.K. Bai
article en
2 citations

Abstract

The DCS-based silane production process exhibits higher reaction efficiency and lower energy consumption compared to the conventional TCS route, while enabling seamless integration with the Siemens process for polysilicon production.

Industrial Chemistry and MaterialsVol. 3(5)
Shanghai Jiao Tong University (CN), Shenyang University of Chemical Technology (CN)
National Natural Science Foundation of China
Openalex Percentile: Top 18%
Advancements in Battery Materials
1.46
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