Ontological Modeling as a Means of Enhancing the Efficiency of MEMS Creation

The identification of MEMS groups (Micro-Electro-Mechanical Systems) products, similar in design and technological characteristics, and the synthesis of basic technological processes for such groups are possible based on semantically organized knowledge bases with an ontological structure. This allows to identify the relationships between basic MEMS structures and manufacturing processes and enables the rapid initiation of mass production of heterogeneous types of MEMS products grouped by design and technological principles. A method for synthesizing basic technological processes for MEMS manufacturing is proposed, based on the formation of a design and technological knowledge base with a semantic structure of information blocks of MEMS designs and manufacturing technologies, containing ontological classes of products, and allowing the integration of products with different operating principles with common basic elements into a unified manufacturing process.