Low loss PVD SiN waveguides with 300mm wafer size
We present a photonic platform based on Physical Vapor Deposition (PVD) SiN at 300mm wafer size. C-Band (1550nm) propagation losses obtained for low deposition temperature of SiN (200°C) were down to 0.30dB/cm and 0.13dB/cm after annealing at 800°C. Low propagation losses were obtained as well for O-band (1310nm) and around 900nm wavelength. Those results, highlight the interest of PVD SiN for industrial scale photonic applications when a low temperature budget integration is needed with no compromise on performances.
Authors
- Karen Ribaud
- Eleonora Garoni (ORCID: https://orcid.org/0000-0002-8581-5211)
- Nicolas Dunoyer
- Laura C. Sauze
- Benjamin Dey
- Lavinia Nistor
- Guillaume Rodriguez
- Quentin Wilmart
- Taha Vollaire
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2025-04-14
- DOI
- https://doi.org/10.1109/siphotonics64386.2025.10985021
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00