Towards precise trimming and programming of photonic integrated circuits
Methods to achieve a high-resolution phase trimming within silicon waveguides incorporating Ge implanted sections are investigated. The trimming is performed electrically using on-chip microheaters. The average resolution of phase change per voltage pulse achieved by this work was approximately 0.0007π radians.
Authors
- Goran Z. Mashanovich (ORCID: https://orcid.org/0000-0003-2954-5138)
- Xingshi Yu (ORCID: https://orcid.org/0000-0002-3315-0342)
- David J. Thomson (ORCID: https://orcid.org/0000-0002-1838-2663)
- Xingzhao Yan (ORCID: https://orcid.org/0000-0002-2466-3015)
- Graham T. Reed (ORCID: https://orcid.org/0009-0002-5314-6604)
- Weihong Shen (ORCID: https://orcid.org/0000-0001-9949-7843)
- Xia Chen (ORCID: https://orcid.org/0000-0002-0994-5401)
- Weiwei Zhang (ORCID: https://orcid.org/0000-0002-1086-5775)
- April Logan
Institutions
- University of Southampton (GB)
Publication Details
- Published
- 2025-04-14
- DOI
- https://doi.org/10.1109/siphotonics64386.2025.10984480
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Royal Society