Harnessing optomechanical interactions in unreleased silicon resonators
Integrated optomechanics finds increasingly broadening applications. Here, we propose and demonstrate a novel approach to simultaneously confine optical and mechanical modes in non-suspended silicon resonators using subwavelength structuration. A record acoustic quality factor of up to 1280 is achieved under ambient conditions and room temperature.
Authors
- Daniele Melati (ORCID: https://orcid.org/0000-0002-3427-0186)
- Éric Cassan (ORCID: https://orcid.org/0000-0003-2802-7689)
- Laurent Vivien (ORCID: https://orcid.org/0000-0002-2980-7225)
- Eirini Parmenopoulou
- David González‐Andrade (ORCID: https://orcid.org/0000-0003-4402-877X)
- Paula Nuño Ruano (ORCID: https://orcid.org/0000-0002-3727-1213)
- N. D. Lanzillotti‐Kimura (ORCID: https://orcid.org/0000-0002-6056-5551)
- Hiba El Batoul Ferhat
- Jianhao Zhang (ORCID: https://orcid.org/0000-0002-4851-3257)
- Carlos Alonso-Ramos
- Paul J. Robin
Institutions
- Centre National de la Recherche Scientifique (FR)
- Centre de Nanosciences et de Nanotechnologies (FR)
- National Research Council Canada (CA)
Publication Details
- Published
- 2025-04-14
- DOI
- https://doi.org/10.1109/siphotonics64386.2025.10985421
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- HORIZON EUROPE Framework Programme