Aluminum nitride-silicon hybrid thermo-optic phase shifter
We demonstrate a thermo-optic phase shifter based on an AlN-SOI platform, achieving a π-phase shifting power of 14 mW for Mach–Zehnder interferometers (MZIs) and 1.7 mW for ring resonators. Both the MZI and ring resonator phase shifters exhibit a bandwidth of 145 kHz.
Authors
- Lipeng Xia (ORCID: https://orcid.org/0009-0002-5695-7154)
- Weixiong Huang
- Yi Zou (ORCID: https://orcid.org/0000-0002-7675-8542)
Institutions
- ShanghaiTech University (CN)
Publication Details
- Published
- 2025-04-14
- DOI
- https://doi.org/10.1109/siphotonics64386.2025.10984728
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00