Ferroelectric Flexible Temperature Sensor

In this paper the interest in sensors based on ferroelectric materials is shown. The prospects of using elastic temperature sensors are noted. A technology has been proposed and technological and research equipment has been selected for the creation and testing of a sensitive element of a flexible temperature sensor. The modes of ion and plasma treatment, as well as magnetron sputtering, have been worked out. Test samples of the sensor element have been obtained. The effect of plasma and ion treatment modes on the topology of silicone with barium titanate particles has been studied. It was found that ion treatment reduces the roughness of the elastomer surface (from 469 to 275 nm), and plasma treatment increases the roughness of the elastomer surface (from 496 to 644 nm). The characteristics of the tested samples under various manufacturing models are investigated. It is shown that plasma treatment in Ar/O2 (90/10%) improves ferroelectric properties of the material.