Modeling of Active Dampers Based on Magnetorheological Elastomers for Precision Equipment

Active vibration protection systems are required for modern micro- and nanotechnology equipment. The paper describes active dampers based on magnetorheological elastomers for vibration protection of precision equipment. The results of modeling and calculation of electromagnetic systems, as well as experimental data on the parameters of active dampers are presented. An active damper with Helmholtz coils allows obtaining a magnetic field in the region of the membrane made of magnetorheological elastomer greater than that of a damper with a single coil at the same control current. In addition, the mechanical properties of the membrane can be adjusted without creating a force that deforms it. Experimental studies of a prototype active damper showed that the amplitude of membrane oscillations decreases with increasing vibration frequency, which is due to the viscoelastic properties of the magnetorheological elastomer and an increase in the efficiency of passive vibration isolation.