The Properties Investigation Results of Low-Temperature Co-Fired Ceramics
The following paper presents the findingsresults of a study conducted in the domainin the field of low-temperature co-fired ceramics (LTCC) production are presented. LTCC is a material that is employed extensively in numerous sectors widely used in many areas of the microelectronics industry. A notable application is the fabrication, including the creation of vacuum-tight housings for sensors, which are utilised for diverse of various purposes. The influence of technological modes of key production stages on the dimensions of ceramic blanks was evaluated using mathematical modeling and regression analysis. A pParticular focus attention was placed on paid to the impactinfluence of plasma-chemical etching on the hydrophilicity of ceramic surfaces, a process which is essential pivotal for the application of ying thin films and masks. The following paper presents eExperimental data on changes in the wetting angle using various gas mixtures for plasma treatment are presented. Mathematical models were obtained to describedescribing the dependence of surface hydrophilicity on plasma-chemical etching parameters were obtained. The results of ceramic surface structure analysis using a scanning electron microscope at different stages of the production cycle are presented.
Authors
- Svetlana V. Sidorova (ORCID: https://orcid.org/0000-0002-3002-1246)
- Svyatoslav A. Khokhlun
Institutions
- Bauman Moscow State Technical University (RU)
Publication Details
- Published
- 2025-04-08
- DOI
- https://doi.org/10.1109/reepe63962.2025.10970977
- Primary Topic
- High-Temperature Coating Behaviors
- Type
- article
- Field-Weighted Citation Impact
- 0.00