Development of Generic Custom FILL Parameterized Cell

In this paper, a new generic FILL PCell programmable layout created from scratch to satisfy the custom fill requirements is presented. Since it is currently not possible to generate FILL for RF devices (such as inductors, transformers, etc.) using PV tools, the idea is to create a technique that will allow designers to regulate FILL rather than relying solely on PV tools. To cater this requirement, uniform metal density should be there because it will minimize the impact of increasing resistance caused by thickness thinning due to erosion and dishing. It is possible to fill dummy cells inside RF devices in order to be compliant with metal density rules without degrading their electrical and magnetic performances.