Application of VLSI and MEMS for Hydrogen Sensor Technology

Micro Electro Mechanical Systems (MEMS) along with Very Large-Scale Integrated (VLSI) Circuit technologies are frequently combined due to their shared objective of integrating micromechanical and microelectronic components onto a single chip. The hydrogen sensor detailed in this paper leverages MEMS technology, featuring a silicon photonics based optical readout integrated with a Micro Cantilever (MC) coated with palladium, and a thin-film platinum (Pt) temperature sensor. The entire sensor uses standard surface micromachining techniques. This integration of MEMS with optical readout, which will be the future development initiative of sensor arrays. The room temperature and pressure amounts to changes in hydrogen concentration, 50 ppm for facilitating detection. Analysis of various hydrogen detection sensor reveals that this paper significantly illustrate the usage of PdNi instead of Pd results in achieving the results successfully. The findings will help the R&D domain expert in their works.