Fundamental Rovibrational Excitation in Co2 Low‐Temperature Plasma in the Presence of Common Impurities
ABSTRACT The interactions in plasma recycling are simplified by limiting the excitation of mixtures with or to rovibrations in a low‐temperature glow discharge. In situ infra‐red absorption spectroscopy measures rovibrational temperature trends, analysed for collisional energy transfer. With , symmetric vibrations of show temperature behaviour similar to the asymmetric stretching due to the change in dominance from excitation to relaxation. Adding delays discharge onset, likely because the electronegativity of hinders electron avalanche formation. Both datasets aid in benchmarking kinetic models.
Authors
- A. Brescia (ORCID: https://orcid.org/0000-0002-6597-7846)
- Maik Budde (ORCID: https://orcid.org/0000-0002-9084-4471)
- R. Engeln (ORCID: https://orcid.org/0000-0002-4687-7436)
Institutions
- University of Lisbon (PT)
- Eindhoven University of Technology (NL)
- ASML (Netherlands) (NL)
Publication Details
- Journal
- Plasma Processes and Polymers
- Published
- 2025-05-06
- DOI
- https://doi.org/10.1002/ppap.70034
- Primary Topic
- Catalytic Processes in Materials Science
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- European Commission