S-Parameter Measurement of Silicone Rubber Socket Using Connector-Based Vertical Interconnection Method

Silicon rubber sockets are used as test sockets to match the integration density and high-speed operation of semiconductor packages. However, owing to the thinness and compressibility of silicon rubber sockets, it is difficult to accurately analyze their electrical performance. This study provides an alternative to the method of measuring S-parameters using a probe to determine the electrical performance of a silicone rubber socket. We propose a vertical interconnection measurement method that uses a fixture that includes a connector. The loss caused by the added fixture was removed by applying the 2x-thru de-embedding method. The fixture was designed to apply de-embedding up to a high-frequency band. Finally, de-embedding was applied to determine the S-parameters of the silicone rubber socket. The effectiveness of the vertical interconnection measurement method using connectors was confirmed through a comparison with the simulation results of a silicone rubber socket.