Digital Control Scheme for Class-D Power Amplifier Driving ICP Load Without Matching Network

Class-D power amplifiers driving variable loads, such as inductively coupled plasma (ICP), typically require an impedance matching network, which has a relatively slow matching speed, generally in the millisecond range. To address this issue, this paper proposes a solution that uses a fully digital control method for Class-D power amplifiers to directly drive ICP loads. This solution eliminates the need for an impedance matching network, reducing the overall output power regulation time to just tens of microseconds. Compared to traditional methods that use a VI probe to detect output power, the proposed method in this paper only requires measuring the resonant current in the loop to control the output power, thereby reducing costs and ensuring that the Class-D power amplifier achieves zero-voltage switching (ZVS) throughout the adjustment process. This paper provides a detailed introduction to the design method of the Class-D power amplifier and the overall digital control scheme and validates them via simulation and experimentation. The Class-D power amplifier prototype was designed using SiC MOSFETs, with a Xilinx ZYNQ-XC7Z100 FPGA as the control board. The output frequency varies around 4 MHz, successfully generating plasma.