Investigation on optomechanical accelerometer via dual heterodyne interference self-referencing testing

We introduce an optomechanical accelerometer for low-frequency acceleration detection and noise suppression, based on dual-heterodyne interference self-referencing testing. The accelerometer’s sensitive unit adopts a self-designed “dumbbell”-shaped mass-spring structure made of fused silica, with a theoretical natural frequency of 57.073 Hz. The two ends of the “dumbbell” structure form the reference interference optical system and the measurement interference optical system. Dielectric-coated high-reflectivity mirrors are attached to the structure’s ends. The accelerometer employs a dual-heterodyne interference self-referencing system and incorporates a reference interference optical system. This configuration serves to mitigate noise sources, including those originating from light sources and optical instruments, as well as environmental factors such as temperature and air pressure, improving the signal-to-noise ratio (SNR). Experimental results show that in air, the accelerometer has a noise-equivalent acceleration of 15 ng/√Hz, a 1.3-mg measurement range, and a 47-V/g scale factor. With its high SNR, small size, low cost, and simple setup, the accelerometer holds potential for aerospace, earthquake detection, and other applications.

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Publication Details

Journal
Optical Engineering
Published
2025-05-07
DOI
https://doi.org/10.1117/1.oe.64.5.054101
Primary Topic
Sensor Technology and Measurement Systems
Type
article
Field-Weighted Citation Impact
0.00

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Investigation on optomechanical accelerometer via dual heterodyne interference self-referencing testing

Yanru Zhou, Rui Liu, Jun Liu, Wenyao Liu et al.
Optical Engineering
Sensor Technology and Measurement Systems
article

Investigation on optomechanical accelerometer via dual heterodyne interference self-referencing testing

Yanru Zhou, Rui Liu, Jun Liu, Wenyao Liu, Yulin Wang, Jun Tang, Enbo Xing
article en

Abstract

We introduce an optomechanical accelerometer for low-frequency acceleration detection and noise suppression, based on dual-heterodyne interference self-referencing testing. The accelerometer’s sensitive unit adopts a self-designed “dumbbell”-shaped mass-spring structure made of fused silica, with a theoretical natural frequency of 57.073 Hz. The two ends of the “dumbbell” structure form the reference interference optical system and the measurement interference optical system. Dielectric-coated high-reflectivity mirrors are attached to the structure’s ends. The accelerometer employs a dual-heterodyne interference self-referencing system and incorporates a reference interference optical system. This configuration serves to mitigate noise sources, including those originating from light sources and optical instruments, as well as environmental factors such as temperature and air pressure, improving the signal-to-noise ratio (SNR). Experimental results show that in air, the accelerometer has a noise-equivalent acceleration of 15 ng/√Hz, a 1.3-mg measurement range, and a 47-V/g scale factor. With its high SNR, small size, low cost, and simple setup, the accelerometer holds potential for aerospace, earthquake detection, and other applications.

Optical EngineeringVol. 64(05)
North University of China (CN)
National Natural Science Foundation of China, China Postdoctoral Science Foundation, National Key Research and Development Program of China
Openalex Percentile: Top 91%
Sensor Technology and Measurement Systems
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