A Silicon Microring Resonator for Refractive Index Carbon Dioxide Gas Sensing
Silicon microring resonators (MRRs) are promising for on-chip optical gas sensing due to their strong light-matter interaction, compact footprint, and mass-scalable fabrication potential. However, for refractive index sensors, it is essential to consider the cross-sensitivity to temperature induced by the thermal-optic effect in MRRs. To address this challenge, we demonstrate a silicon MRR coated with gas-sensitive polyhexamethylene biguanide hydrochloride as the upper cladding for carbon dioxide sensing. The engineered MRR exhibits distinct temperature and gas sensitivities for TE<sub>0</sub> and TE<sub>1</sub> modes. With the linear independent responses, a gas sensitivity of -0.90 pm/ppm within a range of 700 ppm is demonstrated in conjunction with the temperature compensation. The response and recovery times of gas sensing are measured as ∼3.5 and 1.5 min. Our study paves the way for on-chip optical gas sensing with temperature compensation.
Authors
- Zhenzhou Cheng (ORCID: https://orcid.org/0000-0003-4842-9458)
- Hon Ki Tsang (ORCID: https://orcid.org/0000-0003-2777-1537)
- Guoxian Wu
- Zunyue Zhang (ORCID: https://orcid.org/0000-0002-1674-3680)
- Youfu Geng (ORCID: https://orcid.org/0000-0002-0019-3813)
- Yu Du (ORCID: https://orcid.org/0000-0002-3265-8515)
- Cheng Tan (ORCID: https://orcid.org/0000-0003-2343-9166)
- Jiaqi Wang (ORCID: https://orcid.org/0000-0003-2210-9608)
- Li Xu (ORCID: https://orcid.org/0000-0001-5788-6429)
- Si Chen (ORCID: https://orcid.org/0000-0002-5603-1450)
- Xuejin Li (ORCID: https://orcid.org/0000-0002-2405-0390)
- Penghao Ding
- Hui Zhang (ORCID: https://orcid.org/0009-0007-5278-6358)
Institutions
- Georgia Institute of Technology (US)
- Tianjin University (CN)
- Chinese University of Hong Kong (HK)
- Shenzhen University (CN)
- Integrated Optoelectronics (Norway) (NO)
- The University of Tokyo (JP)
Publication Details
- Journal
- ACS Sensors
- Published
- 2025-05-06
- DOI
- https://doi.org/10.1021/acssensors.5c00568
- Citations
- 13
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 9.50
Funders
- Science and Technology Foundation of Shenzhen City
- National Natural Science Foundation of China
- Research Grants Council, University Grants Committee
- Natural Science Foundation of Guangdong Province
- Natural Science Foundation of Tianjin City