Tailored microstructure and enhanced bonding strength of in-situ surface modified Cu flakes via oxidation–reduction bonding

• In-situ surface modified Cu flakes were achieved via the transformation of premade oxide to Cu. • The growth mechanism of oxide was detailed and the dominant diffusion method was determined. • The correlation between surface microstructure of Cu flakes and sintered Cu joint strength was investigated. It is generally believed that oxidation is detrimental to sintered Cu interconnection for power electronic and should be completely removed before sintering. In this study, in-situ surface modified Cu flakes with high sinterability were fabricated via the transformation of premade oxide to Cu during oxidation–reduction bonding (ORB). The oxides formed on Cu flake surface show a morphological evolution from uniform nanograins into irregular microbulges during longer oxidation durations, which results in reduced Cu nanoparticles and Cu mixture of microhillocks and nanoparticles, respectively. The growth mechanism of oxide and its dominant diffusion method were detailed. The sintered Cu joint strength increases with increasing number of oxide grains, while excess oxides will cause coarsening of reduced Cu nanoparticles and degradation of joint strength. The reduced Cu mixture is found to be beneficial to joint strength by increasing the sintering density. Under optimal ORB conditions, the joint strength reaches 80 MPa and only degrades 34 % after 1000 h aging. This study first reveals the effect of oxide morphology on reduced Cu structure by formic acid atmosphere and sintered Cu joint strength. The proposed bonding process is compatible with the existing reflow furnace and could provide new approach to achieve sintered Cu interconnections.

Authors

Institutions

Publication Details

Journal
Materials & Design
Published
2025-05-05
DOI
https://doi.org/10.1016/j.matdes.2025.114048
Primary Topic
3D IC and TSV technologies
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Tailored microstructure and enhanced bonding strength of in-situ surface modified Cu flakes via oxidation–reduction bonding

Sheng Gao, Siliang He, Zhiliang Pan, Hiroshi Nishikawa et al.
Materials & Design
3D IC and TSV technologies
article

Tailored microstructure and enhanced bonding strength of in-situ surface modified Cu flakes via oxidation–reduction bonding

Sheng Gao, Siliang He, Zhiliang Pan, Hiroshi Nishikawa, Xiangdong Liu, Yang Zuo
article en

Abstract

• In-situ surface modified Cu flakes were achieved via the transformation of premade oxide to Cu. • The growth mechanism of oxide was detailed and the dominant diffusion method was determined. • The correlation between surface microstructure of Cu flakes and sintered Cu joint strength was investigated. It is generally believed that oxidation is detrimental to sintered Cu interconnection for power electronic and should be completely removed before sintering. In this study, in-situ surface modified Cu flakes with high sinterability were fabricated via the transformation of premade oxide to Cu during oxidation–reduction bonding (ORB). The oxides formed on Cu flake surface show a morphological evolution from uniform nanograins into irregular microbulges during longer oxidation durations, which results in reduced Cu nanoparticles and Cu mixture of microhillocks and nanoparticles, respectively. The growth mechanism of oxide and its dominant diffusion method were detailed. The sintered Cu joint strength increases with increasing number of oxide grains, while excess oxides will cause coarsening of reduced Cu nanoparticles and degradation of joint strength. The reduced Cu mixture is found to be beneficial to joint strength by increasing the sintering density. Under optimal ORB conditions, the joint strength reaches 80 MPa and only degrades 34 % after 1000 h aging. This study first reveals the effect of oxide morphology on reduced Cu structure by formic acid atmosphere and sintered Cu joint strength. The proposed bonding process is compatible with the existing reflow furnace and could provide new approach to achieve sintered Cu interconnections.

Materials & DesignVol. 254
Chongqing University of Posts and Telecommunications (CN), Guilin University of Electronic Technology (CN), The University of Osaka (JP)
Openalex Percentile: Top 92%
3D IC and TSV technologies
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.