Reversibly deformable submicron disks enabling electrical modulation of visible spectrum response

Metaphotonics has opened up new possibilities for ultra-high-resolution imaging beyond the limits of optical diffraction. While passive metaphotonics initially facilitated advancements in ultrafine pixel drawing and printing, challenges remain for dynamic imaging applications. To address these challenges, we introduce a type of active metaphotonic device utilizing nano-opto-electro-mechanical system (NOEMS) technology capable of modulating the visible spectrum. This proposed NOEMS features aligned nanoscale Au disks separated by a SiO2 pillar, allowing control of photonic resonance modes across the visible spectrum when an electrostatic force is applied. Through electromechanical and optical modeling, we investigate visible spectrum tuning in response to external voltage changes. Experimental validation with samples fabricated using an electrical contacting scheme demonstrates the feasibility of this approach for dynamic visual imaging systems.