Development of Diopside-Modified Marl-Based Dielectric Composite for Microelectronics Applications

This research explores the modification of marl by the incorporation of diopside (CaMgSi₂O₆) to develop a composite material with improved dielectric properties, while addressing environmental and economic challenges through the use of abundant natural resources. X-ray fluorescence (XRF) analysis reveals a high silicate content in the raw marl, mainly SiO₂ (68.12%) and Al₂O₃ (12.54%), while laser particle size analysis indicates a homogeneous grain size distribution centered around 100 µm. The composite was synthesized by the solid-state reaction method, achieving good phase homogeneity. X-ray diffraction (XRD) and infrared spectroscopy confirm the incorporation of diopside, while SEM analysis shows a porous morphology with granular aggregates. The modified material has an average particle size of 11.653 µm, optimizing the electrical properties. Impedance spectroscopy demonstrates improved dielectric performance, with accumulated permittivity and reduced losses, which improves energy storage and dissipation. Tests showed the remarkable stability of dielectric properties over a wide frequency range (10 Hz to 10 MHz) and low-temperature dependence. The performance was demonstrated on a single sample with a thickness of 0.63 mm, demonstrating consistent efficiency. These results position the diopside-modified marl as a promising candidate for electrochemical and microelectronic applications.