Tunable Matching Network with Dual Phase-Switched Impedance Modulation Actuators

Accurate, rapid, and dynamically-controlled impedance matching offers significant advantages for a wide range of present and emerging radio-frequency (RF) power applications. This work develops a solid-state switched-mode tunable matching network (TMN) that enables faster and more precise impedance matching than conventional techniques. The implementation is based on a recently-proposed technique, Phase-Switched Impedance Modulation (PSIM), which entails the switching of passive elements at the RF operating frequency, effectively modulating their impedances. PSIM has shown promise for implementing fast, solid-state TMNs for high-frequency (HF) applications at kilowatt power levels. This work presents the first TMN design with multiple independently-controlled PSIM tuning elements. The prototype TMN, based on a Π-network topology with GaN FETs, matches a wide range of load impedances to 50 Ω, targeting 13.56 MHz inductively-coupled plasma (ICP) processes. Experimental results demonstrate successful operation up to 150 W input power, highlighting the TMN's potential for significant improvements in RF power delivery systems.