Ion‐Implantation, Epilayer Growth, and Lift‐Off of High‐Quality Diamond Films
Abstract The development of high‐quality diamond films is pivotal for driving advances in quantum technology, power electronics, and thermal management. The ion implantation and lift‐off technique has emerged as a crucial method for fabricating diamond films with controlled thickness and scalable production of large‐area diamond wafers. This study advances the understanding of critical interface dynamics during diamond epilayer growth on ion‐implanted commercial diamond substrates. Leveraging high‐resolution cross‐sectional electron microscopy and spectroscopic analyses, the direct transformation of the damaged diamond layer is revealed into a graphitic layer during epilayer overgrowth, eliminating the need for high‐temperature annealing. Raman and photoluminescence spectroscopy mappings along the side section highlight the exceptional quality and purity of the epilayer, showcasing nitrogen‐vacancy center densities comparable to electronic‐grade diamond, making it highly suitable for quantum and electronic applications. Finally, the epilayer detaches efficiently via electrochemical etching, leaving a substrate with low surface roughness that is reusable for multiple growth cycles. These results provide valuable insights into refining the ion implantation and lift‐off process, bridging critical gaps in interface evolution, and establishing a foundation for sustainable, high‐performance diamond films across diverse technological applications.
Authors
- A. Glen Birdwell (ORCID: https://orcid.org/0000-0001-5235-3260)
- Xiang Zhang (ORCID: https://orcid.org/0000-0002-1561-2195)
- Bradford B. Pate (ORCID: https://orcid.org/0000-0002-3288-2947)
- Eliezer Fernando Oliveira (ORCID: https://orcid.org/0000-0002-7161-8217)
- Pulickel Madhavapanicker Ajayan (ORCID: https://orcid.org/0000-0001-8323-7860)
- Mahesh R. Neupane (ORCID: https://orcid.org/0000-0002-4806-6581)
- Elias Garratt (ORCID: https://orcid.org/0000-0002-0331-3876)
- Anand B. Puthirath (ORCID: https://orcid.org/0000-0003-4064-6271)
- Abhijit Biswas (ORCID: https://orcid.org/0000-0002-3729-4802)
- Tia Gray (ORCID: https://orcid.org/0000-0002-9957-2898)
- Kinfung Ngan
- Tony Ivanov (ORCID: https://orcid.org/0000-0002-1472-788X)
- Shuo Sun (ORCID: https://orcid.org/0009-0003-9196-8905)
- Tymofii S. Pieshkov (ORCID: https://orcid.org/0009-0004-3995-1484)
- Di Chen (ORCID: https://orcid.org/0000-0001-7379-8955)
- Robert Vajtai
- Suresh Nonis
Institutions
- United States Naval Research Laboratory (US)
- Joint Institute for Laboratory Astrophysics (US)
- DEVCOM Army Research Laboratory (US)
- University of Colorado Boulder (US)
- United States Army Combat Capabilities Development Command (US)
- University of Houston (US)
- Rice University (US)
- Universidade Estadual Paulista (Unesp) (BR)
Publication Details
- Journal
- Advanced Functional Materials
- Published
- 2025-04-30
- DOI
- https://doi.org/10.1002/adfm.202423174
- Citations
- 5
- Primary Topic
- Diamond and Carbon-based Materials Research
- Type
- article
- Field-Weighted Citation Impact
- 2.59
Funders
- National Science Foundation
- Alfred P. Sloan Foundation
- W. M. Keck Foundation
- Fundação de Amparo à Pesquisa do Estado de São Paulo
- Coordenação de Aperfeiçoamento de Pessoal de Nível Superior
- Conselho Nacional de Desenvolvimento Científico e Tecnológico
- Fundação de Amparo à Pesquisa do Estado da Bahia
- Air Force Office of Scientific Research
- Army Research Office