Low blaze angle grating for fully dispersive x-ray spectroscopy

We demonstrate fabrication of an ultra-low blaze angle (LBA) grating designed for time-resolved spectroscopy in the x-ray region. A blaze angle of 0.12° was achieved by the groove depth reduction process providing a perfect saw-tooth shape of the grooves. The 200 lines/mm LBA grating exhibited high diffraction efficiency at a photon energy of 8 KeV. Use in a spectrometer would open up dispersive x-ray absorption spectroscopy across a wide energy range including the K edges of 3d transition metals, with much greater efficiency than traditional crystal spectrometers.