26.6%-Efficiency Silicon Heterojunction Solar Cell with High-Quality Cerium and Hydrogen Codoped Indium Oxide Transparent Electrode
High-performance transparent conductive oxides (TCOs) with low electrical resistivity and high transparency are highly desirable for silicon heterojunction (SHJ) solar cells. Herein, high-quality cerium (Ce) and hydrogen codoped indium oxide (ICO:H) is prepared by reactive plasma deposition (RPD) and verified on SHJ solar cells. The effects of CeO2 doping ratio, H2/Ar ratio, and annealing treatment on the optoelectronic properties of ICO:H were investigated and optimized. We obtain high-performance ICO:H films with simultaneous state-of-the-art mobility of 169.2 cm2/(V s), low carrier concentration of 1.9 × 1020 cm–3, and high transparency. As a result, a certified power conversion efficiency (PCE) of 26.6% is achieved for SHJ solar cells with ICO:H, featuring less dependency on the underlying hydrogenated nanocrystalline silicon oxide (nc-SiOx:H) layer. The implementation of ICO:H in an industrial production line demonstrates a higher PCE and better yield.
Authors
- Gangqiang Dong (ORCID: https://orcid.org/0000-0003-3371-9014)
- Xinbo Yang (ORCID: https://orcid.org/0000-0003-2687-493X)
- Chaochao Mo
- Jun Hong Zhou (ORCID: https://orcid.org/0000-0001-5729-7261)
- Chenran He
- Cao Yu (ORCID: https://orcid.org/0000-0001-6307-2245)
- Chen‐Wei Peng (ORCID: https://orcid.org/0000-0001-8445-4541)
- Xiaohong Zhang (ORCID: https://orcid.org/0000-0002-6732-2499)
- Qi Wang (ORCID: https://orcid.org/0000-0001-5511-5284)
- Xinyu Wang (ORCID: https://orcid.org/0000-0002-3676-2408)
- Kun Gao (ORCID: https://orcid.org/0000-0003-0188-5317)
- Jian Zhou (ORCID: https://orcid.org/0009-0007-1658-8215)
- Xinmin Cao
- Qian Kang (ORCID: https://orcid.org/0009-0001-7394-2248)
Institutions
- Maxwell Technologies (United States) (US)
- Beijing University of Technology (CN)
- Maxwell Technologies (Switzerland) (CH)
- Nano Carbon (Poland) (PL)
Publication Details
- Journal
- ACS Energy Letters
- Published
- 2025-04-29
- DOI
- https://doi.org/10.1021/acsenergylett.5c00543
- Citations
- 3
- Primary Topic
- Silicon and Solar Cell Technologies
- Type
- article
- Field-Weighted Citation Impact
- 2.19
Funders
- National Natural Science Foundation of China
- Jiangsu Provincial Department of Education
- Jiangsu Science and Technology Department
- Suzhou Municipal Science and Technology Bureau
- Collaborative Innovation Center of Suzhou Nano Science and Technology
- Basic Research Program of Jiangsu Province
- National Key Research and Development Program of China