Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

The hydrogen outgassing rate of a vacuum chamber made of AISI 1020 low-carbon steel was found to be notably smaller than a similar chamber made of AISI 316L stainless steel following heat treatment at 150 °C. When the chambers were baked at 400 °C, the outgassing rate of the 1020 low-carbon steel chamber was approximately 2000 times smaller than that of the 316L stainless-steel chamber. After quantifying hydrogen outgassing rates, vacuum chambers made of 1020 low-carbon steel and 316L stainless steel were heated for a prescribed duration and then pumped with an ion pump and nonevaporable getter pump to reach “ultimate pressure.” The 1020 low-carbon steel chamber reached lower pressures than the 316L stainless-steel chamber. Monte Carlo simulation predictions using the measured hydrogen outgassing rates are in good agreement with the ultimate pressure measurements. Our measurements indicate that low-carbon steel can provide pressures within the extreme high vacuum range (<7.5 × 10−13 Torr) if care is taken to minimize the surface area contribution from stainless steel.