Analysis of the Working Mechanism of MEMS Inertial Switch Based on Centrifugal Dynamic Visualization Test System

A centrifugal dynamic visualization test system was designed to analyze the dynamic response process and microscopic contact state of MEMS inertial switches under centrifugal load. An optical test system is used to visualize the inertial switches on their axis of rotation, enabling the device's response to be observed. In particular, this article uses the variable mass method to rapidly and efficiently analyze the sequential motion mechanism of inertial switches by using the test system. The results demonstrate that the test system can visualize the sequential motion process of inertial switches under centrifugal action. The test system can be used to observe and record the motion in an area of less than 100 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">μ</i>m × 100 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">μ</i>m more clearly at high rotational speeds. It substantiates the assertion that the test system effectively observes the working mechanism of devices under centrifugal action.