Enhanced MEMS piezoresistive pressure sensor through silicon carbide diaphragm and chromium rod beams support integration in robust environmental sustainability

Purpose This research aims to develop a novel micro electro mechanical systems piezoresistive pressure sensor that can function in challenging conditions with high temperatures and pressures between 0 and 40 MPa. The goal of the work is to improve the localized stiffness, linearity and sensitivity by integrating Chromium rod beams into the Silicon Carbide (SiC) diaphragm and SiC piezoresistors. This will provide a sophisticated solution for harsh environment applications in the automotive, medical, industrial domains and energy and power generation. Design/methodology/approach Rod beams are incorporated into the clamped-edge rectangular diaphragm of the pressure sensor’s design to increase rigidity and regulate deflection. Numerical simulations and analytical modeling are used to assess important performance metrics including linearity and sensitivity. Thin plate and small deflection theories are applied in MATLAB for numerical analysis and results are validated using Finite Element Analysis (FEA) in COMSOL Multiphysics. Findings Finite Element Analysis (FEA) in COMSOL Multiphysics is used to validate the results of numerical simulations that are carried out in MATLAB. The sensitivity of the suggested sensor is significantly improved, reaching 3.395 mV/V/MPa, which is higher than similar values documented in the literature. This improvement comes from the well-designed integration of SiC piezoresistors with chromium rod beams. With the new diaphragm structure, the sensor’s linearity and sensitivity are efficiently managed. Originality/value An inventive technique for incorporating rod beams with piezoresistive components into a SiC diaphragm is shown in this work, allowing for enhanced performance in high-temperature and high-pressure settings. The suggested design sets a new standard for performance under challenging operating conditions and presents a novel approach to pressure sensor development for cutting-edge applications.