The Fabrication and Characterization of Surface-Acoustic-Wave and Resistive Types of Ozone Sensors Based on Zinc Oxide: A Comparative Study

Micro-Electro-Mechanical System (MEMS) technology is employed to fabricate surface acoustic wave (SAW)-type and resistive-type ozone sensors on quartz glass (SiO₂) substrates. The fabrication process commences by using a photolithography technique to define interdigitated electrodes (IDEs) on the substrates. Electron-beam evaporation (EBE) followed by radio frequency (RF) magnetron sputtering is then used to deposit platinum (Pt) and chromium (Cr) electrode layers as well as a zinc oxide (ZnO) sensing layer, respectively. Finally, annealing is performed to improve the crystallinity and sensing performance of the ZnO films. The experimental results reveal that the ZnO thin films provide an excellent ozone-concentration sensing capability in both sensors. The SAW-type sensor demonstrates a peak sensitivity at a frequency of 200 kHz, with a rapid response time of just 35 s. Thus, it is suitable for applications requiring a quick response and high sensitivity, such as real-time monitoring and high-precision environmental detection. The resistive-type sensor shows optimal sensitivity at a relatively low operating temperature of 180 °C, but has a longer response time of approximately 103 s. Therefore, it is better suited for low-cost and large-scale applications such as industrial-gas-concentration monitoring.