High-precision tip-based nanofabrication and nanometrology in extended macroscopic working areas

This paper introduces the Nano Fabrication Machine (NFM-100), a state-of-the-art system with a working range of up to 100mm in diameter, equipped with an integrated tip-based system, which serves both as an atomic force microscope (AFM) and as a tool for Field-Emission-Scanning-Probe-Lithography (FE-SPL). By combining these two functionalities, the NFM-100 enables the fabrication and analysis of micro- and nanostructures with exceptional resolution and accuracy, reaching down to a single nanometer, across large areas. This is achieved in a single setup without requiring any changes in tools or sensors. The paper first outlines the design of the NFM-100 and then shows its capability to perform AFM scans in large areas. Furthermore, the paper details the fundamental principles behind the FESPL manufacturing process.