Impact of Non-Vertical Sidewalls on Bandgap Properties of Lithium Niobate Photonic Crystals

We investigate the influence of non-vertical sidewall angles on the band structure characteristics of thin-film lithium niobate (LN) photonic crystals (PhCs), considering both suspended LN membranes and LN on insulator (LNOI) configurations. Utilizing the gap-to-midgap ratio as a figure-of-merit, we observe a 34% reduction for a suspended LN PhC with 60° sidewall angles compared to the one with vertical sidewalls and a more substantial 73% reduction for LNOI PhCs with 70° sidewall angles. We address this challenge through the optimization of geometrical parameters of PhC unit cells with non-vertical sidewalls, taking fabrication feasibility into account. Our work provides a design guideline for the development of realistic LN PhC devices for future large-scale LN photonic circuits.