Design and Analysis of High-Precision Workbench with Large Stroke and Heavy Load for Fabricating Large-Area Grating

When scanning beam interference lithography (SBIL) technology is used for grating fabrication, the stroke, bearing capacity, and accuracy of the workbench determine the size and accuracy of the grating. For large-area gratings with dimensions exceeding the meter level, the existing workbench cannot fully meet the requirements. Therefore, the structure design, drive type, and assembly technology of the workbench were studied in this research, and a two-dimensional workbench with a large stroke, heavy load, and high precision was developed. The performance of this workbench was tested. The stroke of the workbench can reach 1800 mm × 700 mm; the straightness is better than 1.5 μm for the whole stroke range. The load can be up to 2.5 t and the positioning accuracy can achieve the nanometer level. A scanning exposure experiment was carried out with this workbench and a grating of 1400 mm × 420 mm was made. The performance index of the grating was outstanding, achieving the intended goals of the experiment.