A New Matrix Percolation Model for Dielectric Breakdown With Nonuniform Defect Generation
In this study, we propose a new matrix version of the existing dielectric breakdown (BD) percolation model for non-uniform defect generation. Its calculation framework is established utilizing the graph theory of discrete mathematical. This new model is verified by applying to the case of high-<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">k</i>/interfacial layer bilayer gate stack. Furthermore, we also demonstrate the potential of this model in its application to MOSFET’s off-state TDDB or other complex situations by incorporating the TCAD simulations. The flexibility and extensibility of the model is beneficial for further understanding the physical mechanisms of dielectric breakdown in general cases.
Authors
- Chu Yan (ORCID: https://orcid.org/0000-0002-7596-0167)
- Yi Zhao (ORCID: https://orcid.org/0000-0001-5368-3595)
Institutions
- Zhejiang University (CN)
Publication Details
- Journal
- IEEE Electron Device Letters
- Published
- 2025-04-24
- DOI
- https://doi.org/10.1109/led.2025.3563934
- Citations
- 2
- Primary Topic
- Copper Interconnects and Reliability
- Type
- article
- Field-Weighted Citation Impact
- 0.85
Funders
- National Science and Technology Major Project