Fabrication of high-quality and high-efficiency microchannels using parallel picosecond laser with Chemical-Assisted approach
To meet the needs of the increasing number of analytical and biomedical applications , a high-quality and high-efficiency microchannel parallel fabrication method is proposed for K9 glass by picosecond laser . Microchannels obtained by this method have a 79% width uniform and an 84% depth uniform. Laser parameters dependency is clarified. Furthermore, a high-temperature chemical-assisted etching process is used to reduce the surface roughness characteristic of Sa to 75%. Four or more beam points can be generated to simultaneously process more extreme quality microchannels by this method, which can be realized in the future.
Authors
- Fengyun Zhang (ORCID: https://orcid.org/0000-0003-2863-9888)
- Yoshio Hayasaki (ORCID: https://orcid.org/0000-0001-6826-9995)
- Haitao Dong (ORCID: https://orcid.org/0000-0002-8937-0184)
- Shufeng Sun (ORCID: https://orcid.org/0000-0002-5816-2112)
- Peter Monka (ORCID: https://orcid.org/0000-0002-0963-5235)
- Yong Pang (ORCID: https://orcid.org/0000-0002-3068-7312)
- Xi Wang (ORCID: https://orcid.org/0000-0002-5412-9673)
- Harith Bin Ahmad
- Jin Wang
- Pingping Wang (ORCID: https://orcid.org/0000-0001-7849-3624)
Institutions
- Technical University of Košice (SK)
- Utsunomiya University (JP)
- University of Malaya (MY)
- Qingdao University of Technology (CN)
Publication Details
- Journal
- Optics & Laser Technology
- Published
- 2025-04-24
- DOI
- https://doi.org/10.1016/j.optlastec.2025.113020
- Citations
- 5
- Primary Topic
- Innovative Microfluidic and Catalytic Techniques Innovation
- Type
- article
- Field-Weighted Citation Impact
- 3.37