Patterning and repair of transparent conductive oxide films with capillary printing
Thin films of Transparent Conductive Oxides (TCO) are used as electrodes or optical filters in display devices. Although ITO (Indium Tin Oxide) usage is widespread today, alternative materials such as ZnO (zinc oxide) or SnO<sub>2</sub> (tin dioxide) are promising, yet they remain challenging to pattern at the micrometer scale. Using the High Precision Capillary Printing (HPCaP) technology developed by Hummink, thin masking layers of polymers are printed on a silicon sample before deposing a TCO layer by Atomic Layer Deposition (ALD). Removing the polymer yields the expected pattern with a pixel size smaller than 5μm. Alternatively, ZnO can be directly printed by HPCaP using a suspension of nanoparticles. Our approach shows promises for prototyping and repair of TCO-based display devices.
Authors
- Amin M’Barki (ORCID: https://orcid.org/0000-0002-8989-1705)
- Tony Jullien
- Marc Nel-lo (ORCID: https://orcid.org/0000-0002-1893-6558)
- Ludovic Hahn
- C. Guérin (ORCID: https://orcid.org/0000-0002-0148-9966)
- Frédéric Raynal
- Nathan Bigan
- Laurent Pain
- Achille Guitton
- V. Jousseaume
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2025-04-24
- DOI
- https://doi.org/10.1117/12.3051792
- Primary Topic
- Nanomaterials and Printing Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00